Spannungsrisstrennen von mono- und polykristallinem Silizium
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| License | CC Attribution - NonCommercial 3.0 Germany: You are free to use, adapt and copy, distribute and transmit the work or content in adapted or unchanged form for any legal and non-commercial purpose as long as the work is attributed to the author in the manner specified by the author or licensor. | |
| Identifiers | 10.5446/17095 (DOI) | |
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| Production Place | Labor 6 - Laserinstitut Hochschule Mittweida |
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Computer animation
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Wafer (electronics)Computer animation