Laser - Hochratebearbeitung mit 2D Polygonscanner an Siliziumwafern
Formal Metadata
| Title | Laser - Hochratebearbeitung mit 2D Polygonscanner an Siliziumwafern |
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| Alternative Title | High speed Laser structuring of Silicon wafer material using a 2D Polygon scanning system |
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| License | You are free to use, adapt and copy, distribute and transmit the work or content in adapted or unchanged form for any legal and non-commercial purpose as long as the work is attributed to the author in the manner specified by the author or licensor. |
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| Production Place | Labor 6 - Laserinstitut Hochschule Mittweida |
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| Abstract | | German | German Laser - Hochratebearbeitung mit 2D Polygonscanner an Siliziumwafern
(Scangeschwindigkeit: 200 m/s) | | English | English High speed Laser structuring of Silicon wafer material using a 2D Polygon scanning system |
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| Keywords | | German | German | | English | English |
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