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Silicon Micromachined Dimensional Calibration Artifact for M

Metadaten

Formale Metadaten

Titel Silicon Micromachined Dimensional Calibration Artifact for M
Autor Hy Tran
Herausgeber Sandia National Laboratories (SNL)
Erscheinungsjahr 2008
Sprache Englisch

Inhaltliche Metadaten

Fachgebiet Technik
Abstract Improves measurement accuracy for producing miniaturized devices such as fuel injectors, watch components, and inkjet printer parts as these high-volume parts are being manufactured. 2008 R&D 100 w...  

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