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Binary Pt-Si nanostructures prepared by focused electron-beam-induced deposition

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Binary Pt-Si nanostructures prepared by focused electron-beam-induced deposition
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Electron-beam-induced deposition – principle and applications
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163
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CC Attribution - NoDerivatives 4.0 International:
You are free to use, copy, distribute and transmit the work or content in unchanged form for any legal purpose as long as the work is attributed to the author in the manner specified by the author or licensor.
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Abstract
In recent years electron-beam-induced deposition (EBID) has shown impressive development as a micro- and nanofabrication tool. A particularly interesting class of materials that can be prepared by EBID is the so called nanogranular metals. Granular metals are artificial materials that consist of a conducting phase of metallic nanoparticles embedded in a carbon-rich dielectric matrix. The charge transport in such systems is dominated by tunneling between neighboring metallic nanoparticles, which makes them suitable for strain-sensing applications. In the video we demonstrate the basic principle of EBID and the preparation of binary Pt–Si nanostructures. As a practical application, the strain-sensing ability of the deposits is verified by a cantilever-based deflection technique.
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