Mikrosysteme und Nanotechnologie
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| Number of Parts | 4 | |
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| License | CC Attribution - NonCommercial - NoDerivatives 2.5 Switzerland: You are free to use, copy, distribute and transmit the work or content in unchanged form for any legal and non-commercial purpose as long as the work is attributed to the author in the manner specified by the author or licensor. | |
| Identifiers | 10.5446/36964 (DOI) | |
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