In recent years electron-beam-induced deposition (EBID) has shown impressive development as a micro- and nanofabrication tool. A particularly interesting class of materials that can be prepared by EBID is the so called nanogranular metals.
Granular metals are artificial materials that consist of a conducting phase of metallic nanoparticles embedded in a carbon-rich dielectric matrix. The charge transport in such systems is dominated by tunneling between neighboring metallic nanoparticles, which makes them suitable for strain-sensing applications. In the video we demonstrate the basic principle of EBID and the preparation of binary Pt–Si nanostructures. As a practical application, the strain-sensing ability of the deposits is verified by a cantilever-based deflection technique. |