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Microwave plasmas - efficient and versatile sources

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Microwave plasmas - efficient and versatile sources
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CC Attribution 3.0 Germany:
You are free to use, adapt and copy, distribute and transmit the work or content in adapted or unchanged form for any legal purpose as long as the work is attributed to the author in the manner specified by the author or licensor.
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Production PlaceBerlin

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Compact plasma source which can be operated under atmospheric pressure and therefore requires no vacuum technology. Thus, many tasks for which low-pressure plasmas are used nowadays can be accomplished much more cost efficiently. Some new applications, e.g. medical plasma treatment, become only accessible with atmospheric plasma technology.
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